AS-IS MKS Micro Vision2 Gas Analyzer Assembly Pfeiffer SplitFlow80 Vacuum

Description

This is an as-is MKS Gas Analyzer Assembly. Save thousands and buy used from Green Industrial today!
The motor in this listing has damage to the outside shell, the internal components are unharmed. Please see the pictures for more information.
Venting Valve Information
Manufacturer: Pfeiffer
Model: Venting Valve (shielded), 24V DC
Model No.: PM Z01 290
Connection Flanges, In and Out: G 1/8"
Inlet pressure max.: 1500 hPa (absolute)
Gas flow at atmospheric pressure: 130 hPa·l/s
Leakage rate: < 1 · 10-9 Pa m3/s, < 7.5 · 10-9 Torr l/s, < 1 · 10-8 mbar l/s
Vacuum Information
Manufacturer: Pfeiffer
Model: SplitFlow 80
Model No.: PM P04 013
Oil: PM 143 740-T
S(N₂): 67 l/s
n: 1500 Hz
f: 90000 1/min
Vacuum Information
Manufacturer: Pfeiffer
Mod.: TC 110
Mod. Nr.: PM C01790 A
Input: 24V DC ±5% 6.3A
Output: 0 - 24V 10 A, 0 - 1500 Hz
Gas Analyzer Information
Manufacturer: MKS
Family: Spectra
Type: Residual Gas Analyzer
Measurement Technique: Mass Spectrometry
Mass Range: 100, 200, or 300 amu
Detector: Faraday
Faraday: 1.5e-11 Torr (2e-11 mbar)
Filaments: Tungsten or Thoria coated Iridium
Maximum Analyzer Operating Pressure: 7.6e-5 Torr (1e-4 mbar)
Ion Source Sensitivity: 2e-4 A/mbar
Resolution: Better than 10% valley for peaks of equal height across mass range
Bake Out Temperature: 250°C (with extender or electronics removed)
Operating Temperature: 200°C Faraday only with electronics 10 - 40°C, 150°C Multiplier with electronics 10 - 40°C and pressure <1e-8 mbar, 90°C Multiplier with electronics 10 - 40°C and pressure <1e-5 mbar
Cross Beam Ion Source: Single, double, or triple, depending on configuration.
UHV Ion Source: Single, double, or triple, depending on configuration.
UHV Out-gassing Rate: <1e-9 mbar -l/s
PVD Ion Source: Single, double, or triple, depending on configuration.
Zero Blast Effect: Double & Triple Filter: <5 ppm baseline levels next to mass 2 (not applicable with 5 in. single version)
Maximum Operating Conditions: 10 - 40°C, 80% RH (non condensing)
Microchannel Plate: 3.8e-14 Torr (5e-14 mbar)
Single Channel EM: 7.6e-15 Torr (1e-14 mbar) triple configuration only
Electronics Weight on Flange: 1.7 kg
Data Acquisition Method: Dedicated real-time acquisition processor
Data Acquisition Speed: <3 ms per point for analog scanning
Data Collection Methods: Analog scanning, full mass range 8, 16 or 32 points/amu, Barchart scanning, Peak-jump collection of up to 15 peaks per scan, Complete recipe control to link multiple acquisition into a single scan, (Process Eye Professional and TOOLweb RGA only)
Settling Time: <20 ms (to 1 ppm of Maximum Signal)
Control Method: CE operating system processor with web-server interface
Command Structure: Documented ASCII command protocols
Multiplier Protection: Automatic removal of over-range peaks from all scan modes, dedicated multiplier inhibit line for over temperature or over-pressure and x-trip filament and multiplier protect for over-pressure
Number of Stored Source Settings: 6 sets including ion source parameters, alignment, resolution, detector calibrations, Stored in electronics and recalled by EasyView, Process Eye Professional, or TOOLweb RGA
Software Controlled Tuning Parameters: Electron energy, 20 - 100 eV, Emission current, 0 - 2 mA (5 mA degas), Ion energy, 0 - 10 V, Ion extraction, 0 to -130V, Filter pole bias, 0 to -10 to +10 V
Mounting Flange: DN 40 CF-F
Item No.: 51186W
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